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9.MEMS氣體傳感器(qi)

【所屬領域】核(he)心電(dian)子(zi)元(yuan)器件(jian)

【中央企(qi)業名稱】中國兵器工業集團有限公司

【成果簡(jian)介】MEMS氣(qi)(qi)體(ti)(ti)傳(chuan)(chuan)(chuan)感(gan)器適用(yong)(yong)(yong)于(yu)室內(nei)空(kong)氣(qi)(qi)質(zhi)量監測(ce)、手機、電(dian)(dian)(dian)(dian)腦等(deng)消(xiao)費類(lei)電(dian)(dian)(dian)(dian)子產(chan)品(pin)應用(yong)(yong)(yong)檢測(ce)空(kong)氣(qi)(qi)質(zhi)量；也適用(yong)(yong)(yong)于(yu)呼出(chu)氣(qi)(qi)體(ti)(ti)檢測(ce)儀(yi)、室內(nei)煙霧(wu)報警等(deng)。MEMS氣(qi)(qi)體(ti)(ti)傳(chuan)(chuan)(chuan)感(gan)器利用(yong)(yong)(yong)MEMS工(gong)藝在(zai)(zai)硅基襯(chen)底上(shang)制(zhi)作微熱板，所使(shi)用(yong)(yong)(yong)的(de)氣(qi)(qi)敏材料(liao)(liao)是(shi)在(zai)(zai)清潔空(kong)氣(qi)(qi)中(zhong)電(dian)(dian)(dian)(dian)導(dao)(dao)率較(jiao)低的(de)金屬氧化物(wu)半導(dao)(dao)體(ti)(ti)材料(liao)(liao)。當傳(chuan)(chuan)(chuan)感(gan)器所處(chu)存在(zai)(zai)氣(qi)(qi)體(ti)(ti)環(huan)境中(zhong)時，傳(chuan)(chuan)(chuan)感(gan)器的(de)電(dian)(dian)(dian)(dian)導(dao)(dao)率隨空(kong)氣(qi)(qi)中(zhong)被檢測(ce)氣(qi)(qi)體(ti)(ti)的(de)濃度而發(fa)生改變。該氣(qi)(qi)體(ti)(ti)的(de)濃度越高，傳(chuan)(chuan)(chuan)感(gan)器的(de)電(dian)(dian)(dian)(dian)導(dao)(dao)率就越高。使(shi)用(yong)(yong)(yong)簡(jian)單的(de)電(dian)(dian)(dian)(dian)路即(ji)可將電(dian)(dian)(dian)(dian)導(dao)(dao)率的(de)變化轉換為與(yu)該氣(qi)(qi)體(ti)(ti)濃度相(xiang)對應的(de)輸(shu)出(chu)信(xin)號(hao)。本產(chan)品(pin)采(cai)用(yong)(yong)(yong)MEMS工(gong)藝，結(jie)構(gou)堅固，抗震性好(hao)(hao)；具有尺寸(cun)小、功(gong)耗低、靈(ling)敏度高、響(xiang)應恢復快(kuai)、驅動(dong)電(dian)(dian)(dian)(dian)路簡(jian)單、穩定性好(hao)(hao)、壽命長等(deng)優點。技術成熟度9級。

【主要指標】

1.加熱電阻：88Ω±5Ω

2.加熱(re)功耗：≤50mW

3.敏(min)感體表面電阻：1KΩ~30KΩ（50ppm乙(yi)醇）

4.靈敏度：R0（空氣(qi)）/RS（50ppm乙醇）≥3.0

【應用推廣需求】

1.應用推廣方式(shi)：銷售(shou)、轉讓

2.應用推(tui)廣領域：可(ke)在白電(dian)、消費(fei)電(dian)子、環(huan)境監測等行業應用推(tui)廣。

【成果圖片】

【聯系人】

集團聯系(xi)人(ren)：左睿，010-68963314，zuor@gfcn.cn 成果聯系(xi)人(ren)：朱震星，18662470410，xing_1018@126.com

【責任編輯：家正】